Research on inclination angle measurements with high accuracy using servo - accelerometer 伺服加速度計用于高精度傾角測量的研究
The principal needs of realization on strategic inertial accelerometer are large measurement range ( higher than 70g ) and high stability . in this paper aimed at a most basic and typical " sandwich " structure with easy realization in techniques , the system of micromachined electrostatic servo - accelerometer is analyzed in detail on static and dynamic state , mainly including : the influence on the z - component of the center of mass , lateral accelerations disturbance and the applied bias voltage on the stability of the sensor 戰略慣導加速度計實用化的首要條件是大量程( 70g以上)和高穩定性,本文針對一種最基本、最為典型和工藝上較易實現的“三明治”結構,從靜態和動態兩方面對電容式微機械靜電伺服加速度計系統進行了詳細分析。