Study on the self - diffusion coefficient for the long ch 高壓下長鏈分子的自擴散系數研究
Research interest : surface science ; kikuchi electron holography ; electron multiple - scattering techinques ; molecular dynamical simulations ; ab initio total energy calculations ; self - diffusion on metal surfaces ; dissociative adsorption of h2 on metal surfaces 研究興趣:表面科學,電子全像術,電子多重散射分析理論技術,分子動力學模擬,第一原則總能量計算,表面原子動態學,氫分子的解離吸附。
At same time macroscopical and microcosmic mathematical model of nitridation are investigated . in this paper the thermodynamics of direct - nitridation , effect of temperature and nitrogen ambience on nitridaton and self - diffusion are discussed in the theory of physical chemistry in detail 同時本文用物理化學的原理討論了硅片氮氣直接氮化的熱力學方程、氮化條件的理論根據和原子的自擴散,從理論上證明隨溫度升高氮化加劇,氣氛純度越高氮化越容易的結論。